2002 PECVD System for DLC Thin Film Deposition 38" x 38" x 38"
Used
Stock: 8346HP
Model: DLC (Diamond Like Coating) | Serial Number:
Location: 2301 Belgrave Ave, Huntington Park, CA 90255
Equipped With:
– (1) Advanced Energy Pinnacle Plus 5kW DC RF Plasma Generator, M/N# 3152435-102L (SN# 285630)
– (2) MKS Mass Flow Controllers
– (2) MKS PR4000 Digital Power Supply/Readouts
– (1) Control Cabinet with (4) Digital Display Chamber Process Controllers
Specs:
Plasma Enhanced Chemical Vapor Deposition Type:: Diamond Like Coating